Semiconductor
RARE & SPECIALITY GASES
Semiconductor process gases are used throughout every stage of manufacture – from growing single crystal silicon to each wafer fabrication process step: oxidation, chemical vapor deposition, sputtering, resist, etch, thermal diffusion and ion implantation.
Semiconductor Gases
Uses & Applications
Semiconductor Gas Mixtures
- Arsine
- Diborane
- Phosphine
- Silane
Semiconductor Piping Systems
AWA can provide semiconductor gas handling equipment along with semi gas piping systems. We provide turnkey equipment installation services.
- Turnkey Installations that increase efficiency and reduce installation times.
- Highest Quality Semi Gas Piping Systems in the market today.
- Reliable Vacuum Jacketed LN2 Piping Systems available with a wide range of options.
Pure Semiconductor Gases
- Arsine
- Boron Trifluoride
- Chlorine
- Dichlorosilane
- Germane
- Halocarbon 14
- Halocarbon 23
- Halocarbon 32
- Hydrogen Chloride
- Nitrous Oxide
- Phosphine
- Silane
- Silicon Tetrafluoride
Air Water America has extensive resources to procure and supply semiconductor gases and services. AWA partners with many global semi gas manufacturers and can provide these gases in numerous quantities, sizes and purities.